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     Vistec Semiconductor Systems GmbH (previously Leica Microsystems Semiconductor GmbH) will showcase their microscope modules at this year’s Semicon West show  in San Fransisco. These modules deliver a new level of optic performance to the semiconductor industry, providing standard moduls as well as tailor-made solutions.

    Vistec will present an overview of cutting edge high performance optics at Semicon West. Field-proven in Vistec inspection and metrology systems, all standard modules can be seamlessly integrated into the customer’s systems. 

    Recently the latest OEM Module INH3000DUV has been customized for a leading manufacturer of mask-repair systems. The INH3000DUV is a fully automatic microscope module, combining the wave length ranges Visual, UV (365nm) and DUV (248nm). Furthermore it enables the implementation of the latest design rules in the semiconductor industry as to inspection and metrology applications. Additionally, it is equipped with a module for laser coupling in order to repair mask defects.

    “A very special add-on option is the use of our innovative DUV water-immersion objective DUV AT 200x/1.20 W in the INH3000DUV” states Roger Pingel, Product Manager OEM. This objective enables to display structures or defects down to 60nm. In order to cater for the needs of metrology applications the optic is pivotable, thus providing ideal alignment for high-precision measurement. This objective is installed in the Vistec LWM500WI among others.

    Vistec has many years of experience in R&D of high performance optics. Therefore Vistec has become a leading global supplier of optical inspection and measurement systems. The OEM group supplies standard microscope modules as well as customized versions. “Our customers rely on the consistent quality and reliability of our optics – for all applications ranging from infra-red to Deep-UV,” underlines Pingel.

    In addition, Roger Pingel, Product Manager OEM, directs attention to the design of customized modules: “Collaborative R&D with our clients is important to Vistec. Together we develop concepts to meet production specifications – and then make it work.” At Vistec, utmost importance is attached to customer-orientation and joint R&D from first to last. "We''ve recently had great success with custom projects